日本理音RION KS-41B液体粒子传感器 英文资料
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Measures 0.1µm Particles in Photoresist, SOG and other solutions
0.07µm as Option(For measuring clear solutions such as UPW) |
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< Specification > |
Optical system |
Light-scattering method |
Light source |
Diode pumped solid state laser (wavelength 532 nm, rated output 500 mW) |
Materials of parts exposed to sample |
Synthetic quartz, PFA |
Size range |
1 to 10 channels (Setting range 0.1µm to 0.5µm) |
Sample flow rate |
5 mL/min |
Counting efficiency |
50±10 % |
Maximum particle number concentration |
48 000 particles/mL (at 10 % coincidence loss for 0.1µm particles) |
Power |
DC12 V (supplied by KE-40B1) |
Dimensions and weight |
164 (H) x 464 (W) x 320 (D) mm (excluding protruding parts), Approx. 12.5 kg |
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